Other Parallel Kinematic Positioners / Piezo Stages and Tip/Tilt Positioners

PI is the global leader in piezoelectric parallel positioners . PI's core business is ultra-precision motion control. With more than 700 employees world wide, 40 years of experience in motion control and more than two decades of hexapod mechanics, controller and software design experience, PI has the broadest and deepest portfolio of precision motion techologies and can match your application to the appropriate technology better than anybody else. In addition to motorized hexapod parallel positioners, PI also offers piezoelectric stages. Read on for more information.

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Additional Parallel Kinematics Positoiners: Piezo- Driven Nanopositioning Systems
Serial Kinematics vs. Parallel Kinematics in Nanopositioning Systems




Stacked Serial Kinematics Flexure Nanopositioning System Simple Design, but: Slower response (lower stage carries inertial mass of upper stage); Non-symmetric resonant frequencies (lower stage is slower than upper stage, requires different servo settings). Orthogonality error is mounting-angle dependant. Runout in Y cannot be monitored/compensated by the sensor in the X stage or vice versa.	Nested Serial Kinematics Flexure Nanopositioning System Thinner and better response than Stacked Serial Kinematics, but no other advantages	Parallel Kinematics Flexure Nanopositioning System (In-Plane Tripod) Same ultra-low inertia for X and Y motion, providing higher responsiveness and axis-independent performance. Excellent, mounting independent orthogonality. Reduced runout: X sensor (PI uses non-contact two plate capacitance sensors) can monitor and correct for Y runout and vice versa (Active Trajectory Control). Additional rotation axis (Theta Z) feasible with 3 actuators / sensors and digital controller.

More Information on Low-Inertia Nanopositioning Systems?
Active Trajectory Control
Active Trajectory Control requires parallel metrology feedback. It is available on single module parallel kinematics nanopositioning systems. It improves straightness and flatness to sub-nanometer precision. Digital controllers with advanced coordinate transformation algorithms allow active trajectory control for up to 6 DoF. More information on advanced control techniques for piezo nanopositioning systems

Examples of Parallel Kinematics PiezostageNanopositioning Systems


Custom 6 DOF Single-Module Multi-Axis Design, Capacitive Feedback, Clear Aperture.	P-587 6-DOF Most Advanced Six-Axis Nanopositioning PiezoStage. Travel to 800 痠 and 10 mrad.	P-733 XY Nanopositioning PiezoStage. Capacitive Feedback, Clear Aperture.


P-734 Ultra-High Flatness XY Nanopositioning PiezoStage. Capacitive Feedback, Clear Aperture.	P-541 Low-Profile, Z/Tip/Tilt Tripod Scanning PiezoStages for Microscopy. To 200痠 Travel Range. Clear Aperture	P-714 Low-Profile XY PiezoStage Scanners for Imaging.Compact Size, Highly Cost- Efficient Design, Clear Aperture.

Examples of Parallel Kinematics Steering Mirrors



Parallel Kinematics Differential Drive	Tripod-Piezo-Drive	Active Optics Platform Featuring 3 Actuators (Tripod) and 4 Sensors


S-330 Ultra-Fast Piezo Parallel Kinematics Tip/Tilt Platforms	S-316 High-Speed, Tripod Tip/Tilt Steering Mirror	Active Tip/Tilt mirror for Subaru Telescope (Mauna Kea, Hawaii).

Other Parallel Kinematic Positioners / Piezo Stages and Tip/Tilt Positioners

Additional Parallel Kinematics Positoiners: Piezo- Driven Nanopositioning Systems

Additional Parallel Kinematics Positoiners: Piezo-
Driven Nanopositioning Systems