Stacked Serial Kinematics Flexure Nanopositioning System
- Simple Design, but:
- Slower response (lower stage carries inertial mass of upper stage);
- Non-symmetric resonant frequencies (lower stage is slower than upper stage, requires different servo settings).
- Orthogonality error is mounting-angle dependant.
- Runout in Y cannot be monitored/compensated by the sensor in the X stage or vice versa.
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Nested Serial Kinematics Flexure Nanopositioning System
- Thinner and better response than Stacked Serial Kinematics, but no other advantages
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Parallel Kinematics Flexure Nanopositioning System (In-Plane Tripod)
- Same ultra-low inertia for X and Y motion, providing higher responsiveness and axis-independent performance.
- Excellent, mounting independent orthogonality.
- Reduced runout: X sensor (PI uses non-contact two plate capacitance sensors) can monitor and correct for Y runout and vice versa (Active Trajectory Control).
- Additional rotation axis (Theta Z) feasible with 3 actuators / sensors and digital controller.
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