High-vacuum and ultra-high-vacuum hexapod positioning systems provide compact six-degree-of-freedom motion for semiconductor, photonics, beamline, aerospace, quantum research and scientific instrumentation applications.
Vacuum-compatible hexapods combine six-axis motion with a compact parallel-kinematic architecture. Compared with conventional stacks of linear, rotary and goniometer stages, a hexapod provides X, Y, Z, pitch, roll and yaw motion from one integrated mechanism. This saves space inside vacuum chambers, improves stiffness, reduces moving mass and simplifies cable management.
PI offers electromechanical and piezoelectric hexapod systems for high-vacuum and ultra-high-vacuum and cryogenic environments, including standard catalog products and custom non-magnetic designs for specialized research and industrial applications.
Miniature six-axis vacuum hexapod for compact precision alignment setups where small size, fine motion and high repeatability are required.
Compact vacuum-compatible six-axis hexapod for precision positioning and alignment in limited installation space.
The H-850.x2IV is a high-load vacuum-compatible hexapod for precision six-axis alignment of heavy optics, sensors, vacuum instrumentation and semiconductor-related assemblies. Its compact parallel-kinematic design is especially useful where space inside vacuum chambers is limited.
Ultra-compact hexapod concept for cryogenic environments
Custom precision vacuum hexapod based on the non-magnetic PiezoWalk linear piezo motor principle.
Miniature piezo hexapod for ultra-high-vacuum and non-magnetic precision positioning applications.
Custom six-axis positioning concept for demanding vacuum applications with extended environmental requirements.
Six-axis alignment for wafer inspection, mask positioning, EUV-related systems and vacuum metrology setups.
Precision positioning of lenses, mirrors, sensors and optical assemblies where vacuum compatibility and angular alignment are required.
Compact motion systems for synchrotron beamlines, surface science, quantum research, cryogenic experiments and analytical instruments.
Multi-axis positioning of satellite sensors, optical payloads and test articles in vacuum and thermal-vacuum environments.
Space inside vacuum chambers is often limited. A hexapod replaces a stack of individual linear, rotary and goniometer stages with one compact parallel-kinematic mechanism. This reduces footprint, avoids moving cable loops, improves stiffness and allows the center of rotation to be defined in software.
| Feature | Vacuum Hexapod | Stacked Stage System |
|---|---|---|
| Architecture | Parallel-kinematic six-axis mechanism | Several individual linear, rotary and goniometer stages stacked together |
| Footprint | Compact, especially valuable inside chambers | Often larger because each axis adds height and width |
| Cable Management | Fixed cables; no moving cable chains | Moving cables may be required for upper axes |
| Stiffness | High stiffness from load-sharing struts | Can decrease as axes are stacked |
| Center of Rotation | Virtual pivot point defined by software | Usually constrained by mechanical stack geometry |
| Best Fit | Compact 6-DOF alignment, optics, sensors, beamline and vacuum instrumentation | Long single-axis travel or simple Cartesian motion |
Related Hexapod Resources
Standard Hexapods | Miniature Hexapods | High-Load Hexapods | Special and Non-Magnetic Hexapods
PI is the world leader in high precision Hexapod parallel kinematic robotics design / Stewart Platform systems for multi-axis alignment and precision automation applications. PI's core business is ultra-precision motion control. With more than 1900 employees world wide, 50+ years of experience in precision motion control and more than three decades of hexapod mechanics, controller and software design experience, PI can get your multi-axis precision motion and automaton project up to speed significantly faster than anybody else. Adding to our experience are the motion control specialists from the PI USA and PI miCos performance automation divisions, with a long history of hexapod parallel robotics design know-how and a broad product offering of high-vacuum and ultra-high-vacuum (UHV) precision positioning systems. PI's electro-mechanical and piezoelectric Hexapod (Stewart-Gough) motion and positioning platforms have many advantages over hydraulic hexapods. They are more energy efficient, more compact and provide significantly higher accuracy. In addition, most are self locking, with no power requirements at rest. Available in many standard and custom configurations, sizes, for loads from 2 kg to more than 1000 kg.
