Vacuum Compatible 6-Axis Hexapod Positioners /
Vacuum Motion Platforms
Home   << Previous    Next >>
PI is the world leader in high precision Hexapod parallel kinematic robotics design / Stewart Platform systems for multi-axis alignment and precision automation applications. PI's core business is ultra-precision motion control. With more than 1400 employees world wide, 50 years of experience in precision motion control and more than three decades of hexapod mechanics, controller and software design experience, PI can get your multi-axis precision motion and automaton project up to speed significantly faster than anybody else. Adding to our experience are the motion control specialists from the PI USA and PI miCos performance automation divisions, with a long history of hexapod parallel robotics design know-how and a broad product offering of high-vacuum and ultra-high-vacuum (UHV) precision positioning systems.

PI's electro-mechanical and piezoelectric Hexapod (Stewart-Gough) motion and positioning platforms have many advantages over hydraulic hexapods. They are more energy efficient, more compact and provide significantly higher accuracy. In addition, most are self locking, with no power requirements at rest. Available in many standard and custom configurations, sizes, for loads from 2 kg to more than 1000 kg.


Most of the following Hexapod Platforms are standard catalog products.
Click here for additional High Force Hexapods, Special & Non-Magnetic Hexapods.

H-811.i2V Small Vacuum Hexapod
M-811 Small Vacuum Hexapod
  • Miniature High Precision Hexapod
  • 6 Axis Positioning System with Controller & Software
  • 5kg (50N) Load Capacity
  • Repeatability to ±0.06µm
  • Velocity to 10mm/sec
  • Diameter: 136mm Bottom Platform / 100mm Top Platform, Height: 114mm
  • Linear Travel Ranges 34 x 32 x 13 mm
  • Rotation Ranges to 42°
PDF Datasheets | More Information

H-824 Compact Vacuum Hexapod
  • Six Degrees of Freedom
  • Vacuum Compatible Versions
  • Load Capacity 5kg (50N)
  • Travel Ranges to 45mm (linear), 25° (rotation)
  • Repeatability to ±0.1µm
  • 300 Nanometer Min. Incremental Motion
  • Compact Design
  • Self Locking to 5kg (50N)
PDF Datasheets | Product Description

M-850K Custom Vacuum Hexapod 6-Axis Positioner Concept for Wide Temperature Range
Hexapod for Wide Temperature Range
  • 6 Degrees of Freedom, Works in Any Orientation
  • Vacuum Compatible up to 10-6 hPa
  • 200 kg Load Capacity (Vertical)
  • Repeatability to ±1 µm
  • Encoder Resolution to 5 nm
Back to TopPDF Datasheets | More Hexapods

H-840 HexaLight™ Six-Axis Parallel Kinematics Microrobot
HexaLight 6-Axis-Parallel Kinematics Microrobot
  • Six Degrees of Freedom
  • High Resolution: 20nm steps
  • Brushless Motors for High Performance and Rapid Response
  • No Moving Cables for Improved Reliability and Precision
  • 40kg Load Capacity
  • Repeatability to ±1 Microns
  • Smaller and Stiffer than Stacked 6-Axis Stages, Better Dynamics
  • Vacuum-Compatible Versions
  • Virtualized Pivot Point
  • Available Sophisticated 6-Axis Motion Controller Using Vector Algorithms
PDF Datasheets | Product Description

H-850.V50 High Load Vacuum Hexapod to 10-6 hPa
M-850 Hexapod
  • Six Degrees of Freedom
  • Works in Any Orientation
  • No Moving Cables for Improved Reliability and Precision
  • 80kg Load Capacity (Vertical)
  • Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications
  • Repeatability to ±0.2 Microns
  • Significantly Smaller and Stiffer Package than Conventional Multi-Axis Positioners
  • Vacuum-Compatible Versions
  • Linear and Rotary Multi-Axis Scans
  • Virtualized Center of Rotation (Pivot Point)
  • Available Sophisticated 6-Axis Motion Controller Using Vector Algorithms
Back to Top     PDF Datasheets | Product Description

Custom Vacuum Compatible, Non-Magnetic Hexapods
NEXLINE® Vacuum Hexapod
NEXLINE Vacuum Hexapod
  • Precision Vacuum Hexapod
  • Based on Non-magnetic PiezoWalk Linear Piezo Motor Principle
  • Controller with coordinate transformation shown in background
PDF Datasheet | Request Information

P-911k Custom Miniature Vacuum Compatible & Non-Magnetic Hexapod
Miniature NEXLINE Hexapod
  • Precision Miniature Vacuum Hexapod for UHV Environments
  • Based on Non-magnetic PiezoWalk Linear Piezo Motor Principle
  • Nanometer Precision
  • Frictionless Precision flexure joints
  • UHV-compatible to 10-9 hPa
PDF Datasheet | Mini Vacuum Hexapod Datasheet

More Parallel 6-Axis Motorized Positioning Systems
  • Ultra High Vacuum Versions (10-9 mBar)
  • Long Linear Travel Ranges
  • Flexible Arrangement, Easy Customization
  • Many Drive and Motor Options
SpaceFab 6 Axis Precision Motorized Positioner for Vacuum

PI miCos Brochure (PDF): Ultra High Vacuum (UHV) Precision Positioning Systems

More Vacuum & Non-Magnetic Custom Hexapods

Home   << Previous    Next >>