Special 6-Axis Hexapod Positioning Stage Concepts
Custom and application-specific hexapod 6-axis positioning systems for vacuum, non-magnetic environments, astronomy, surgical robotics, inspection systems, high-load motion, and advanced research applications.

Miniature Piezo Hexapod Concept, Vacuum Compatible, Non-Magnetic

Custom Precision Miniature Vacuum Hexapod
- Precision miniature vacuum hexapod concept
- Based on the non-magnetic PiezoWalk linear piezo motor principle
- Designed for applications where magnetic drive systems are not suitable
Custom Vacuum Compatible, Non-Magnetic Hexapods

Custom High-Force Piezo Motor Vacuum Compatible Hexapod
- High-force hexapod concept for vacuum environments
- Based on the non-magnetic PiezoWalk linear piezo motor principle
- Controller with coordinate transformation shown in background

Custom Piezo Motor Hexapod with PiezoWalk Motor Drives
- Custom non-magnetic hexapod example
- Self-locking at rest with no heat generation while holding position
- PiezoWalk motors provide nanometer resolution
- Travel ranges: 10 mm linear, 6° rotation
- Large clear aperture greater than Ø200 mm
- Low-profile design: 140 mm height only
- Up to 500 N force generation
- More information on vacuum compatible motion / positioning stages
Surgical Hexapods

Hexapod +3: Medical Robot Concept with Redundant Measuring System
- Six degrees of freedom
- Works in any orientation
- No moving cables for improved reliability and precision
- 200 kg vertical load capacity
- Repeatability to ±1 µm
- Encoder resolution to 0.005 µm
- Virtual pivot point and vector-based controller
- MTBF 20,000 h

Photo courtesy of IPA
Hexapod as Surgical Robot Concept
- Six degrees of freedom
- Works in any orientation
- No moving cables for improved reliability and precision
- 200 kg vertical load capacity
- Repeatability to ±1 µm
- Encoder resolution to 0.005 µm
- Smaller and stiffer than serial-kinematics systems
- Vacuum-compatible versions available
Hexapods for Astronomy
PI has designed many hexapods and fast tip/tilt systems for the alignment of mirrors in astronomical telescopes. Talk to a PI engineer for more information.

Active Secondary Hexapod with Tip/Tilt Mirror — NASA IRTF
Active secondary mirror for NASA Infrared Telescope Facility (IRTF) on Mauna Kea, Hawaii, with a hexapod 6D alignment system.
- Mirror diameter: 244 mm
- Tip/tilt range: ±250 µrad
- Resonant frequency: 490 Hz

Active Secondary Hexapod with Tip/Tilt Mirror — UKIRT
Active tip/tilt mirror for the United Kingdom Infrared Telescope (UKIRT) on Mauna Kea, Hawaii, with a secondary hexapod 6D alignment system.
- Mirror diameter: 314 mm
- Tip/tilt range: ±500 µrad
- Resonant frequency: 280 Hz

Active Secondary Hexapod for Tip/Tilt Mirrors
Custom hexapod for alignment of secondary mirrors.
Weatherproof Hexapod

Custom Ultra-High-Precision Hexapod for Telescopes / Outdoor Operation
Custom secondary 6-axis hexapod for APEX radio telescopy in Chile.
- Load capacity to 750 N
- Unidirectional repeatability to 5 µm
- Clear aperture Ø420 mm
- Long lifetime: 2 million cycles
- Drive: brushless motors
- Protection class IP64
- Corrosion protection
Video on ALMA (Atacama Large Millimeter Array) radio telescope. PI Hexapod is shown at 0:38.
Hexapod for Inspection Systems

Custom Large-Aperture High-Load Hexapod
- 200 kg vertical load capacity
- Very large aperture: 640 × 820 mm
- Six degrees of freedom
- No moving cables for improved reliability and precision
- Parallel-kinematics design: smaller and stiffer than serial-kinematics systems with better dynamics
- Virtual pivot point
- Sophisticated controller using vector algorithms included
Hexapods for High Loads

Custom Ultra-High-Load Hexapod
- Six degrees of freedom
- Maximum load capacity to 1000 kg
- Repeatability to 2 µm
- Drive: brushless motors with brake
- Vacuum compatible up to 10-6 hPa

Custom Ultra-Heavy-Duty Hexapod for Materials Research
- Load capacity to 1000 kg in any orientation
- Six degrees of freedom
- Travel ranges to ±200 mm and ±20°
- Resolution to 0.8 µm and 0.5 µrad
- Drive: brushless motors with brake
- Sophisticated controller using vector algorithms
Parallel-Kinematics 6-Axis Positioners for Semiconductor Production
Vibration Cancellation and UHV Alignment
- SpaceFAB design allows easy customization and longer linear travel in XY
- UHV versions to 10-9 mbar available
- Many motor and drive options, including linear encoders, steppers, and servos
Explore more hexapod systems:
Standard Hexapods | High Force Hexapods | Vacuum Hexapods | Back to Top
Standard Hexapods | High Force Hexapods | Vacuum Hexapods | Back to Top
