Special 6-Axis Hexapod Positioning Stage Concepts

Custom and application-specific hexapod 6-axis positioning systems for vacuum, non-magnetic environments, astronomy, surgical robotics, inspection systems, high-load motion, and advanced research applications.

Special custom hexapod positioning concepts
Miniature Piezo Hexapod Concept, Vacuum Compatible, Non-Magnetic
Miniature NEXLINE Hexapod

Custom Precision Miniature Vacuum Hexapod

  • Precision miniature vacuum hexapod concept
  • Based on the non-magnetic PiezoWalk linear piezo motor principle
  • Designed for applications where magnetic drive systems are not suitable
Custom Vacuum Compatible, Non-Magnetic Hexapods
NEXLINE vacuum hexapod

Custom High-Force Piezo Motor Vacuum Compatible Hexapod

  • High-force hexapod concept for vacuum environments
  • Based on the non-magnetic PiezoWalk linear piezo motor principle
  • Controller with coordinate transformation shown in background
N-515K non-magnetic hexapod

Custom Piezo Motor Hexapod with PiezoWalk Motor Drives

  • Custom non-magnetic hexapod example
  • Self-locking at rest with no heat generation while holding position
  • PiezoWalk motors provide nanometer resolution
  • Travel ranges: 10 mm linear, 6° rotation
  • Large clear aperture greater than Ø200 mm
  • Low-profile design: 140 mm height only
  • Up to 500 N force generation
  • More information on vacuum compatible motion / positioning stages
Surgical Hexapods
Nonapod hexapod

Hexapod +3: Medical Robot Concept with Redundant Measuring System

  • Six degrees of freedom
  • Works in any orientation
  • No moving cables for improved reliability and precision
  • 200 kg vertical load capacity
  • Repeatability to ±1 µm
  • Encoder resolution to 0.005 µm
  • Virtual pivot point and vector-based controller
  • MTBF 20,000 h
Surgical hexapod
Photo courtesy of IPA

Hexapod as Surgical Robot Concept

  • Six degrees of freedom
  • Works in any orientation
  • No moving cables for improved reliability and precision
  • 200 kg vertical load capacity
  • Repeatability to ±1 µm
  • Encoder resolution to 0.005 µm
  • Smaller and stiffer than serial-kinematics systems
  • Vacuum-compatible versions available
Hexapods for Astronomy
PI has designed many hexapods and fast tip/tilt systems for the alignment of mirrors in astronomical telescopes. Talk to a PI engineer for more information.
Tip/Tilt secondary hexapod

Active Secondary Hexapod with Tip/Tilt Mirror — NASA IRTF

Active secondary mirror for NASA Infrared Telescope Facility (IRTF) on Mauna Kea, Hawaii, with a hexapod 6D alignment system.

  • Mirror diameter: 244 mm
  • Tip/tilt range: ±250 µrad
  • Resonant frequency: 490 Hz
UKIRT active tip tilt mirror hexapod

Active Secondary Hexapod with Tip/Tilt Mirror — UKIRT

Active tip/tilt mirror for the United Kingdom Infrared Telescope (UKIRT) on Mauna Kea, Hawaii, with a secondary hexapod 6D alignment system.

  • Mirror diameter: 314 mm
  • Tip/tilt range: ±500 µrad
  • Resonant frequency: 280 Hz
Custom secondary mirror hexapod

Active Secondary Hexapod for Tip/Tilt Mirrors

Custom hexapod for alignment of secondary mirrors.

Weatherproof Hexapod
Weatherproof hexapod

Custom Ultra-High-Precision Hexapod for Telescopes / Outdoor Operation

Custom secondary 6-axis hexapod for APEX radio telescopy in Chile.

  • Load capacity to 750 N
  • Unidirectional repeatability to 5 µm
  • Clear aperture Ø420 mm
  • Long lifetime: 2 million cycles
  • Drive: brushless motors
  • Protection class IP64
  • Corrosion protection

Video on ALMA (Atacama Large Millimeter Array) radio telescope. PI Hexapod is shown at 0:38.

Hexapod for Inspection Systems
Large-aperture high-load hexapod

Custom Large-Aperture High-Load Hexapod

  • 200 kg vertical load capacity
  • Very large aperture: 640 × 820 mm
  • Six degrees of freedom
  • No moving cables for improved reliability and precision
  • Parallel-kinematics design: smaller and stiffer than serial-kinematics systems with better dynamics
  • Virtual pivot point
  • Sophisticated controller using vector algorithms included
Hexapods for High Loads
Ultra-high-load hexapod

Custom Ultra-High-Load Hexapod

  • Six degrees of freedom
  • Maximum load capacity to 1000 kg
  • Repeatability to 2 µm
  • Drive: brushless motors with brake
  • Vacuum compatible up to 10-6 hPa
Ultra-heavy-duty hexapod

Custom Ultra-Heavy-Duty Hexapod for Materials Research

  • Load capacity to 1000 kg in any orientation
  • Six degrees of freedom
  • Travel ranges to ±200 mm and ±20°
  • Resolution to 0.8 µm and 0.5 µrad
  • Drive: brushless motors with brake
  • Sophisticated controller using vector algorithms
Parallel-Kinematics 6-Axis Positioners for Semiconductor Production

Vibration Cancellation and UHV Alignment

  • SpaceFAB design allows easy customization and longer linear travel in XY
  • UHV versions to 10-9 mbar available
  • Many motor and drive options, including linear encoders, steppers, and servos
SpaceFab 6-axis precision motorized positioner for vacuum
Explore more hexapod systems:
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